ArticleSensors (Basel, Switzerland)2023
Multielectrode Arrays at Wafer-Level for Miniaturized Sensors Applications: Electrochemical Growth of Ag/AgCl Reference Electrodes.
Article in Sensors (Basel, Switzerland), 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
4 citing papers in PubMed.
- Effects of substrate roughness on the fabrication and properties of Ag/AgCl pseudo-reference electrodes for solid-state electrochemical sensors.Frontiers in chemistry · 2026Article
- Long-Lifetime Ag/AgCl Electrodes Prepared by Pulse Current Electrodeposition for Chloride Monitoring in the Concrete Environment.Sensors (Basel, Switzerland) · 2025Article
- Recent Advances in Amperometric Biosensors for Medical Applications: A Mini-Review.Current topics in medicinal chemistry · 2025Review
- Laser-induced graphene electrochemical sensor for quantitative detection of phytotoxic aluminum ions (AlScientific reports · 2024Article
Corrections and comments
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Authors and funding
8 authors.
Funding
Abstract
In this study, a range of miniaturized Ag/AgCl reference electrodes with various layouts were successfully fabricated on wafer-level silicon-based substrates with metallic intermediate layers by precisely controlling the electrochemical deposition of Ag, followed by electrochemical chlorination of the deposited Ag layer. The structure, as well as the chemical composition of the electrode, were characterized with SEM & EDS. The results showed that the chlorination is very sensitive to the applied electric field and background solution. Potentiostatic chlorination, in combination with an adjusted mushroom-shaped Ag sealing deposition, enabled the formation of electrochemical usable Ag/AgCl layers. The stability of the electrodes was tested using open circuit potential (OCP) measurement. The results showed that the reference electrodes stayed stable for 300 s under 3 M KCl solution. The first stage study showed that the stability of the Ag/AgCl reference electrode in a chip highly depends on chip size design, chlorination conditions, and a further protection layer.
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Registered trials
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