ReviewMicromachines2024
Grayscale Lithography and a Brief Introduction to Other Widely Used Lithographic Methods: A State-of-the-Art Review.
Review in Micromachines, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 14 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
14 citing papers in PubMed.
- Nanoscale Roughness in Ultra-Thick Resists by Laser-Scanning Grayscale Direct-Write Lithography and Surface Smoothing.Polymers · 2026Article
- Optical Fourier Surfaces for Integrated Photonics.ACS nano · 2026Article
- Narrow-band asymmetric THz absorbers and polarizers based on impedance-matched, cloaked quasi-BICs in doped Ge microdisk metasurfaces.iScience · 2026Article
- Fabrication of Structured Surface Functional Layers for Enhanced Performance of AgMicromachines · 2026Article
- A Review on the Research Progress of Imprint Film Materials for Nanoimprint Lithography.Micromachines · 2026Review
- Wavelength-Dependent 3D Printing: Introducing 3D Printed Action Plots.Advanced materials (Deerfield Beach, Fla.) · 2026Article
- Design and optimization of CIGS-based solar cell with surface dielectric nanostructures arrangement.Scientific reports · 2026Article
- Plasmonics Meets Metasurfaces: A Vision for Next Generation Planar Optical Systems.Micromachines · 2026Review
- Smooth Critical Dimension Compensation Across Photomask Transmittance Discontinuities Enabled by Selective and Direct Laser Patterning Inside Mask.Micromachines · 2026Article
- Comprehensive Investigation of the Commercial ELP-20 Electron-Beam Lithography Resist.Micromachines · 2025Article
- Computational optical sectioning in Fresnel incoherent correlation holography.Scientific reports · 2025Article
- Nanophotonic Materials and Devices: Recent Advances and Emerging Applications.Micromachines · 2025Review
- Emerging Trends in Thermo-Optic and Electro-Optic Materials for Tunable Photonic Devices.Materials (Basel, Switzerland) · 2025Review
- Innovative Micro- and Nano-Architectures in Biomedical Engineering for Therapeutic and Diagnostic Applications.Micromachines · 2025Review
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
3 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Lithography serves as a fundamental process in the realms of microfabrication and nanotechnology, facilitating the transfer of intricate patterns onto a substrate, typically in the form of a wafer or a flat surface. Grayscale lithography (GSL) is highly valued in precision manufacturing and research endeavors because of its unique capacity to create intricate and customizable patterns with varying depths and intensities. Unlike traditional binary lithography, which produces discrete on/off features, GSL offers a spectrum of exposure levels. This enables the production of complex microstructures, diffractive optical elements, 3D micro-optics, and other nanoscale designs with smooth gradients and intricate surface profiles. GSL plays a crucial role in sectors such as microelectronics, micro-optics, MEMS/NEMS manufacturing, and photonics, where precise control over feature depth, shape, and intensity is critical for achieving advanced functionality. Its versatility and capacity to generate tailored structures make GSL an indispensable tool in various cutting-edge applications. This review will delve into several lithographic techniques, with a particular emphasis on masked and maskless GSL methods. As these technologies continue to evolve, the future of 3D micro- and nanostructure manufacturing will undoubtedly assume even greater significance in various applications.
Indexed as
Identifiers
What Socratic holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the Socratic graph.