ReviewSensors (Basel, Switzerland)2025
Technologies for Fabricating Large-Size Diffraction Gratings.
Review in Sensors (Basel, Switzerland), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 9 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
9 citing papers in PubMed.
- A streamlined set-up for Lloyd's mirror interference lithography, using a single-mode-fibre-coupled laser.Microsystems & nanoengineering · 2026Article
- A Comprehensive Review of Optical Metrology and Perception Technologies.Sensors (Basel, Switzerland) · 2025Review
- Precision Nanometrology: Laser Interferometer, Grating Interferometer and Time Grating Sensor.Sensors (Basel, Switzerland) · 2025Review
- A Review of Optical Metrology Techniques for Advanced Manufacturing Applications.Micromachines · 2025Review
- A Review: Grating Encoder Technologies for Multi-Degree-of-Freedom Spatial Measurement.Sensors (Basel, Switzerland) · 2025Review
- A Review: Absolute Linear Encoder Measurement Technology.Sensors (Basel, Switzerland) · 2025Review
- Interference Field Control for High-Uniformity Nanopatterning: A Review.Sensors (Basel, Switzerland) · 2025Review
- Cross-scale structures fabrication via hybrid lithography for nanolevel positioning.Microsystems & nanoengineering · 2025Article
- A Review on Recent Advances in Signal Processing in Interferometry.Sensors (Basel, Switzerland) · 2025Review
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
2 authors.
Funding
Abstract
Large-size diffraction gratings have played an important role in modern scientific fields such as inertial confinement fusion, large-aperture astronomical telescopes, and high-precision immersion lithography machines with long-stroke displacement stages. However, due to the large size and high accuracy requirements of gratings, and considering the need for high efficiency and low cost, the fabrication of large gratings is extremely difficult. This paper reviews the fabrication technologies for large diffraction gratings, including grating tiling technology, grating ruling technology, single-exposure lithography, optical mosaic grating technology, and scanning beam interference lithography. It introduces the basic principles, representative research, and research progress of these technologies, analyzes their advantages and current problems, and provides reference for the development and optimization of the fabrication technologies of large diffraction gratings.
Indexed as
Identifiers
What Socratic holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the Socratic graph.