ReviewMicromachines2025
A Review of Optical Metrology Techniques for Advanced Manufacturing Applications.
Review in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
4 citing papers in PubMed.
- High-Precision LCCD-Based Focus Metrology for I-Line Lithography: Multi-Sample Repeatability and Adaptability Evaluation.Micromachines · 2026Article
- A Compact Dual-Oblique-Fiber Heterodyne Phase-Shifting Point Diffraction Interferometer.Sensors (Basel, Switzerland) · 2026Article
- Atomic Force Microscopy (AFM)-Based Metrology for Advanced Etching in Three-Dimensional Integrated Circuits.Micromachines · 2026Review
- Curvature-Adoptive CNC Machining of Freeform Optics via Dynamic Tangential Toolpath Optimization.Materials (Basel, Switzerland) · 2025Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
4 authors.
Funding
Abstract
Advanced manufacturing places stringent demands on measurement technologies, requiring ultra-high precision, non-contact operation, high throughput, and real-time adaptability. Optical metrology, with its distinct advantages, has become a key enabler in this context. This paper reviews optical metrology techniques from the perspective of precision manufacturing applications, emphasizing precision positioning and surface topography measurement while noting the limitations of traditional contact-based methods. For positioning, interferometers, optical encoders, and time-of-flight methods enable accurate linear and angular measurements. For surface characterization, techniques such as interferometry, structured light profilometry, and confocal microscopy provide reliable evaluation across scales, from large structures to micro- and nano-scale features. By integrating these approaches, optical metrology is shown to play a central role in bridging macroscopic and nano-scale characterization, supporting both structural assessment and process optimization. This review highlights its essential contribution to advanced manufacturing, and offers a concise reference for future progress in high-precision and intelligent production.
Indexed as
Identifiers
What Socratic holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the Socratic graph.