Evidence map›Paper›PMID 41407898›Full record

ArticleNature2025

3D nanolithography with metalens arrays and spatially adaptive illumination.

Songyun Gu, Chenkai Mao, Anna Guell Izard, Sarvesh Sadana, Dongping Terrel-Perez, Magi Mettry-Yassa, Wonjin Choi, Wenjie Zhou, Hujie Yan, Ziran Zhou and 8 more

Abstract read
PubMed Publisher
In one paragraph

Article in Nature, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 16 papers.

0numbers the graph read from it
0cells of the map it votes in
16citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

16 citing papers in PubMed.

  1. Review
  2. Article
  3. Review
  4. Tailoring Superwettability Through Bioinspired Reentrant Microstructures.Advanced materials (Deerfield Beach, Fla.) · 2026
    Review
  5. Article
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  13. Bioinspired periodic mesoporous tin oxides enable steady nonequilibrium chemical sensing for enhanced gas discrimination.Proceedings of the National Academy of Sciences of the United States of America · 2026
    Article
  14. Article
  15. Article
  16. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

18 authors.

Songyun Gu *Materials Engineering Division, Lawrence Livermore National Laboratory, Livermore, CA, USA.ORCID http://orcid.org/0000-0002-9847-6685
Chenkai Mao *Department of Electrical Engineering, Stanford University, Stanford, CA, USA.
Anna Guell IzardMaterials Engineering Division, Lawrence Livermore National Laboratory, Livermore, CA, USA.ORCID http://orcid.org/0000-0002-4416-7609
Sarvesh SadanaMaterials Engineering Division, Lawrence Livermore National Laboratory, Livermore, CA, USA.ORCID http://orcid.org/0009-0001-0135-9651
Dongping Terrel-PerezComputational Engineering Division, Lawrence Livermore National Laboratory, Livermore, CA, USA.
Magi Mettry-YassaMaterials Science Division, Lawrence Livermore National Laboratory, Livermore, CA, USA.ORCID http://orcid.org/0000-0001-5208-5032
Wonjin ChoiMaterials Science Division, Lawrence Livermore National Laboratory, Livermore, CA, USA.
Wenjie ZhouDivision of Engineering and Applied Science, California Institute of Technology, Pasadena, CA, USA.
Hujie YanDivision of Engineering and Applied Science, California Institute of Technology, Pasadena, CA, USA.
Ziran ZhouDivision of Engineering and Applied Science, California Institute of Technology, Pasadena, CA, USA.ORCID http://orcid.org/0009-0008-9327-3505
Travis MasseyMaterials Engineering Division, Lawrence Livermore National Laboratory, Livermore, CA, USA.
Alex AbelsonMaterials Engineering Division, Lawrence Livermore National Laboratory, Livermore, CA, USA.
You ZhouDepartment of Electrical Engineering, Stanford University, Stanford, CA, USA.
Sijia HuangMaterials Engineering Division, Lawrence Livermore National Laboratory, Livermore, CA, USA.
Chiara DaraioDivision of Engineering and Applied Science, California Institute of Technology, Pasadena, CA, USA.ORCID http://orcid.org/0000-0001-5296-4440
Thejaswi Umanath TumkurMaterials Science Division, Lawrence Livermore National Laboratory, Livermore, CA, USA.ORCID http://orcid.org/0000-0002-0355-3423
Jonathan A FanDepartment of Electrical Engineering, Stanford University, Stanford, CA, USA. jonfan@stanford.edu.ORCID http://orcid.org/0000-0001-9816-9979
Xiaoxing XiaMaterials Engineering Division, Lawrence Livermore National Laboratory, Livermore, CA, USA. xia7@llnl.gov.ORCID http://orcid.org/0000-0003-1255-3289

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

The growing demand for advanced materials, miniaturized devices and integrated microsystems calls for the reliable fabrication of complex, multiscale, three-dimensional (3D) architectures, a need increasingly addressed through light-based and laser-based processes. However, owing to the field-of-view (FOV) limitations of conventional imaging optics, existing 3D laser nanofabrication techniques face fundamental challenges in throughput, proximity error and stitching defects on the path to scaling. Here we present a scalable 3D nanofabrication platform that uses a metalens-generated focal spot array to parallelize two-photon lithography (TPL)

Identifiers

What Socratic holds

Textmetadata
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the Socratic graph.