ReviewMicrosystems & nanoengineering2026
Electrostatically actuated MEMS resonators for magnetic and electric field sensing: a review.
Review in Microsystems & nanoengineering, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
2 citing papers in PubMed.
- Electronics-free, ultra-low-power, wearable sensor chip for high-frequency electromagnetic field detection.Communications engineering · 2026Article
- Lie Classification and Symmetry-Preserving Reduced-Order Modeling of Nonlinear Electrostatic MEMS.Micromachines · 2026Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
3 authors.
Funding
Abstract
Recent advances in microelectromechanical systems (MEMS) resonators have enabled the development of compact devices capable of precise magnetic and electric field sensing. This review focuses on resonant MEMS sensors that employ electrostatic actuation, offering advantages such as low power consumption, fast mechanical response, and CMOS-compatible fabrication. We classify two primary types of resonant MEMS sensors based on their sensing mechanisms, where magnetic field sensors utilize electromagnetic induction and electric field sensors rely on electrostatic induction. For each type, we analyze representative devices in terms of actuation schemes, resonator design strategies, sensitivity enhancement techniques, and directional detection capability. We also address key design considerations and fabrication constraints. The review summarizes current approaches and characteristics of MEMS resonator-based magnetic and electric field sensors with a focus on their structural principles and application contexts. Through this analysis, the review aims to provide insights that support the development of next-generation field sensors for applications in navigation, biomedical diagnostics, vehicle detection, and non-destructive evaluation of electrical systems.
Identifiers
What Socratic holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the Socratic graph.