Ligand Functionality-Dependent Performance of Organotin Carboxylate Resists.

Xiaofei Liu, Tianren Liu, Kaixin Su, Jingxin Lei, Yuanfu Chen, Yuan Chen, Dongxu Yang

Abstract read

In one paragraph

Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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0cells of the map it votes in

0citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

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Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

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0 citing papers in PubMed.

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4 · The record

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5 · Who and what money

Authors and funding

7 authors.

Xiaofei LiuState Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China.

Tianren LiuState Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China.

Kaixin SuState Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China.

Jingxin LeiState Key Laboratory of Advanced Polymer Materials, Polymer Research Institute, Sichuan University, Chengdu 610065, China.

Yuanfu ChenSchool of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.

Yuan ChenState Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China.

Dongxu YangState Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China.ORCID 0000-0002-4753-1154

Funding

National Natural Science Foundation of China No. 52488301Sichuan Major Science and Technology Program 2025ZDZX0025

6 · The paper itself

Abstract

As metal-containing resists attract increasing research interest in high-resolution lithography, gaining insights into the photochemical mechanisms, particularly in relation to the ligand functionality, is actively demanded. In this work, a controlled pair of organotin carboxylates with analogous structures but different functional groups has been designed and synthesized as deep-ultraviolet (DUV) resists. Both resists demonstrate 90 nm half-pitch resolution and the capability of pattern transfer on carbon-based hard-mask layers. Through various characterizations and comparison of the controlled pair, we propose two competitive reaction paths for the organotin system with olefin groups, which regulate the lithographic sensitivity and dissolution contrast. Our findings highlight the structural adjustability of organotin carboxylates and their potential application as high-resolution and etch-durable DUV resists.

Indexed as

deep-ultraviolet lithographymetal-containing resistorganotin carboxylatepattern transferradical-mediated reaction

Identifiers

PMID41597782

DOI10.3390/mi17010001

PMCPMC12844292

What Socratic holds

Textmetadata

LicenceCC BY

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the Socratic graph.