Suspended waveguide-enhanced near-infrared photothermal spectroscopy for ppb-level molecular gas sensing on a chalcogenide chip.

On-chip waveguide sensors have attracted significant attention recently due to their potential for high-level integration. However, so far, on-chip gas sensing based on traditional laser absorption spectroscopy has demonstrated low detection sensitivity, due to weak light-gas interaction over a limited interaction distance. On-chip photothermal spectroscopy (PTS) appears to be a powerful technique to achieve higher sensitivity; its performance is yet constrained to parts-per-million (ppm)-level due to a small fraction of evanescent field in the light-gas interaction zone and fast thermal dissipation through the solid substrate. Herein, we demonstrated suspended chalcogenide glass waveguide (ChGW)-enhanced PTS that overcomes these limitations, enabling highly sensitive parts-per-billion (ppb)-level molecular gas sensing. We fabricated a nanoscale suspended ChGW with a low loss of 2.6 dB/cm using a CMOS-compatible two-step patterning process. By establishing an equivalent PTS model to guide the optimization of the ChGW geometry, we achieved a 4-fold increase in the absorption-induced heat source power and a 10.6-fold decrease in the equivalent heat conductivity, resulting in a 45-fold enhancement in photothermal phase modulation efficiency over the non-suspended waveguides. Combining with a high-contrast waveguide facet-formed Fabry-Perot interferometer, we achieved an unprecedented acetylene detection limit of 330 ppb, a large dynamic range close to 6 orders of magnitude, and a fast response of less than 1 s. The overall system exhibits a noise-equivalent absorption coefficient of 3.8×10