ArticleMicrosystems & nanoengineering2026
Fully flexible large-area MEMS-based triaxial force sensor compatible with flat panel display manufacturing.
Article in Microsystems & nanoengineering, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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Authors and funding
5 authors.
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Abstract
This work describes a fully flexible capacitive Micro-Electro-Mechanical-Systems (MEMS) based Large-Area (LA) triaxial force sensor, compatible with the Flat Panel Display (FPD) production. Thus, it is obtained by means of standard surface micromachining, unlike the reported other flexible sensor technologies, which are based on ad-hoc fabrication processes, that limit their large-scale manufacturing, area covering feature and flexibility. The triaxial force sensor is referred to as pixel. Its response is characterized in the mechanical and electrical domains. The effects of the fabrication-induced residual stresses as well as the applied external pressure and shear load are measured. The 3D Finite Element Method (FEM) model correctly captures the initial deflection due to the residual stresses. It properly simulates the pressure and shear behavior taking into account the contact between the embedded MEMS and the substrate. It represents a valuable tool to provide design guidelines for the MEMS optimization. The pixel normalized pressure sensitivity is equal to 0.0013 kPa
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